Description
The PHI X-tool is designed to make XPS instrumentation accessible to a larger audience. An intuitive touch screen user interface, automatic sample loading, automatic analysis, and automatic report generation removes the requirement to be a surface analysis expert to perform XPS measurements.
Based on PHI’s patented scanning XPS microprobe technology, the X-tool makes it possible for it’s users to perform routine small and large area XPS measurements in three easy steps.
- Scanned, micro-focused, monochromatic X-ray beam
- X-ray beam induced secondary electron imaging (SXI) for 100% accurate point/area selection
- Robust dual beam charge neutralization
- High Performance in both large and micro area XPS analyses
- Chemical state mapping
- Thin film depth profile analysis
- High performance floating column argon ion gun
- Large 75 x 75 mm sample platens
- Recipe driven automatic and interactive analysis modes
- Automatic report generation
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